Accelerate Semiconductor Process and Equipment Development with Physics Intelligence
From optical pattern formation to coupled equipment physics, SolverX accelerates prediction and optimization for semiconductor manufacturing. We connect our Physics Intelligence with your computational models and measurement data to explore designs and process conditions that deliver target outcomes.
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Connect Process Physics to Design and Process Decisions
Applications
Computational Lithography & OPC
Predict optical imaging and evaluate pattern formation. Accelerate simulation and correction iterations to explore mask patterns and exposure conditions that achieve target patterns.
Thermal, Flow & Transport Physics
Evaluate temperature, flow, pressure, and species distributions that influence deposition, etching, thermal processing, and other manufacturing steps.
Equipment & Component Design
Explore the design of chambers, delivery systems, thermal components, and other key modules. Understand how geometry, materials, and physical interactions affect equipment behavior.
Inverse Design & Process Optimization
Start with target patterns, physical distributions, and performance requirements. Identify promising designs and operating conditions, and evaluate sensitivity to process variation.
Connect SolverX Physics Intelligence with your models and measurement data. Apply customized prediction, inverse design, and calibration solutions to your equipment and process development goals.
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